Description
Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures. Preface to the English language edition. Coming age of VLSI elements. Semiconductor market. Evolution of semiconductors. Characteristics of VLSI. VLSI process engineering operations. Packaging and process monitoring technology. Production of silicon wafers and environmental. Process engineering aspects of VLSI production. References. Appendices. Index.
